Coating apparatus – Gas or vapor deposition – Running length work
Patent
1988-03-28
1989-03-28
Pianalto, Bernard
Coating apparatus
Gas or vapor deposition
Running length work
118 501, 118620, 118720, 118722, 118730, C23C 1600
Patent
active
048154156
ABSTRACT:
An apparatus for producing and coiling films of insulating material coated under a vacuum with electrically conductive material, comprising an electron beam vaporizer, a feed drum, a roller disposed above the electron beam vaporizer and looped by the film, a take-up drum, and deflector rolls for establishing a path for the film, at least one plasma source oriented towards the path of the film so that the plasma touches the film, said plasma source being disposed in the region of the path of the film from the electron beam vaporizer to the take-up drum, wherein the plasma source is disposed at the end of the angle of contact specified by one of the deflector rolls.
REFERENCES:
patent: 4393091 (1983-07-01), Shinohara et al.
patent: 4495242 (1985-01-01), Arai et al.
patent: 4581245 (1986-04-01), Nakamura et al.
Bauer Volker
Eberhardt Helmut
Feuerstein Albert
Lammermann Helmut
Lobig Gerard
Leybold-Heraeus GmbH
Pianalto Bernard
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