Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1987-02-26
1988-04-26
Pianalto, Bernard D.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427 40, 427 42, 427116, 427124, 427177, 427296, 427350, B05D 306
Patent
active
047403853
ABSTRACT:
A method and apparatus are disclosed for producing rolls or coils of film of insulating material which has been conductively coated, in a vacuum, by vaporizing conductive material in direct electron beam bombardment and condensing the vapor on the film surface. According to the invention, the film is subjected to a plasma treatment after coating and before the film is wound in a coil.
REFERENCES:
patent: 4393091 (1983-07-01), Shinohara et al.
patent: 4495242 (1985-01-01), Arai et al.
patent: 4581245 (1986-04-01), Nakamura et al.
Bauer Volker
Eberhardt Helmut
Feuerstein Albert
Lammermann Helmut
Lobig Gerald
Leybold-Heraeus GmbH
Pianalto Bernard D.
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