Patent
1987-09-22
1989-03-21
DeMeo, Palmer C.
H05H 500
Patent
active
048147168
ABSTRACT:
In a conventional electron beam-producing apparatus, a field emission gun is combined with an accelerating tube. An electrostatic lens focuses the electron beam diverging from the emitter. This conventional apparatus needs a large power supply for applying potentials to the electrodes of the lens and to the accelerating electrodes. Also, it is difficult to make stationary the position at which the crossover point of the electron beam is imaged. The present invention makes use of voltage-dividing resistors to produce fractions of the accelerating voltage. These fractions of the voltage are applied to the electrodes of the electrostatic lens and to various electrodes. This permits the use of a power supply that is smaller in size than conventional. The number of the used voltage-dividing resistors is increased or decreased, depending on the accelerating voltage. This makes it possible to fix the position of the crossover point imaged by the electrostatic lens.
REFERENCES:
patent: 3946268 (1976-03-01), Welter
patent: 4160905 (1979-07-01), Davey
patent: 4383180 (1983-05-01), Turner
Edited by T. Imura, S. Maruse and T. Suzuki, Electron Microscope 1986, Proceedings of The XITH International Congress on Electron Microscopy held in Kyoto, Japan, Aug. 31-Sep. 7, 1986, Journal of Electron Microscopy, vol. 35, Supplement (1986), pp. 265-266.
Kato Shoji
Tomita Takeshi
DeMeo Palmer C.
Jeol Ltd.
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