Apparatus for producing a semiconductor device

Details Apparatus for producing a semiconductor device Apparatus for producing a semiconductor device

1980-10-24

1986-05-13

McIntosh, John P.

Coating apparatus

Work holders, or handling devices

118715, B05C 1100

Patent

active

045879281

ABSTRACT:
A process tube that is impermeable to impurities for use in the manufacture of semiconductor devices. The process tube is made of sintered silicon carbide and it may optionally be infiltrated with elemental silicon. The inner surface of the process tube includes a layer of high density silicon carbide to prevent diffusion of impurity species through the walls of the process tube.

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patent: 3746569 (1973-07-01), Pammer et al.
patent: 3834349 (1974-09-01), Dietz et al.
patent: 3951587 (1976-04-01), Alliegro et al.
patent: 3998333 (1976-12-01), Kamada
patent: 4016313 (1977-04-01), Schrewelius

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