Apparatus for processing substrate and apparatus for...

Details Apparatus for processing substrate and apparatus for... Apparatus for processing substrate and apparatus for...

2006-07-19

2010-11-09

Berman, Jack I (Department: 2881)

Electric lamp or space discharge component or device manufacturi

Apparatus

Having evacuation or degasification means or means to...

C445S070000

Reexamination Certificate

active

07828623

ABSTRACT:
In a substrate processing apparatus for processing a substrate in a hermetic container equipped with an exhaust tube and a gas introducing tube, an introducing port of the gas introducing tube is positioned inside the exhaust tube to make uniform an atmosphere in the hermetic container, in the vicinity of an exhaust port of the exhaust tube.

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