Apparatus for processing substrate

Details Apparatus for processing substrate Apparatus for processing substrate

1998-09-14

2000-07-18

Edwards, Laura

Coating apparatus

Work holders, or handling devices

118 52, 118317, 118320, B05C 1302

Patent

active

060902051

ABSTRACT:
A method of processing a substrate having the steps of placing a substrate for forming an LCD on a support, mounting a cover on the substrate in such a manner that a clearance is formed from at least either surface of the substrate placed on the support, introducing developer or pure water into the clearance, bringing the developer or pure water into contact with at least either surface of the substrate, processing the substrate with the developer or pure water, removing the cover from the substrate, and discharging the substrate from the support.

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