Cleaning and liquid contact with solids – Apparatus – Automatic controls
Patent
1982-10-29
1984-07-10
Bleutge, Robert L.
Cleaning and liquid contact with solids
Apparatus
Automatic controls
134140, 134153, 134200, 156345, B08B 302
Patent
active
044587040
ABSTRACT:
Apparatus for processing semiconductor wafers is described as having a rotor mounted on a horizontal axis with support bearings at each end of the rotor. Wafers are arranged in a carrier which can be loaded and unloaded into the rotor of the apparatus through an access opening which is directed in a generally upward position when the rotor is stopped. Control means provide for automatic stopping of the rotor in a correct position for unloading and reloading at the end of each processing cycle.
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Bleutge Robert L.
Xertronix, Inc.
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