Apparatus for processing glass substrate

Details Apparatus for processing glass substrate Apparatus for processing glass substrate

1999-06-07

2000-09-19

Diamond, Alan

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20429801, 20429802, 20429809, 20429831, 118723R, 118728, 361234, 156345, 134105, 134166R, 134171, 134201, 134137, C23C 1434, C23C 16458, C23F 102, H01L 21203, H01L 21302

Patent

active

06120661&

ABSTRACT:
A glass substrate processing apparatus, part of which comprises a composite material, the composite material being formed of a matrix and a ceramic layer formed on a surface of the matrix by a thermal spraying method, the matrix being formed of a ceramic member and an aluminum-containing material filled in a texture of the ceramic member.

REFERENCES:
patent: 5909354 (1999-06-01), Harada et al.
patent: 5981913 (1999-11-01), Kadomura et al.

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