Apparatus for processing a substrate providing an efficient arra

Details Apparatus for processing a substrate providing an efficient arra Apparatus for processing a substrate providing an efficient arra

1997-12-18

2000-08-08

Aftergut, Jeff H.

Coating apparatus

With means to centrifuge work

118 66, 118319, 118320, 414935, 414936, 414941, B05C 1300

Patent

active

060996439

ABSTRACT:
An atmospheric conditioning unit for supplying temperature- and humidity-controlled air to a chemical processing part (spin coater) is arranged immediately above a chemical processing part, between this chemical processing part and a heat treatment part (including a hot plate and a cool plate). Namely, the chemical processing part, the atmospheric conditioning unit and the heat treatment part are vertically arranged in a stacked manner. The atmospheric conditioning unit receives external air from an opening. A closed partition is provided to block air flow between the atmospheric conditioning unit and a transport area. The temperature- and humidity-controlled air supplied from the atmospheric conditioning unit to the spin coater forms a downflow in the spin coater, and thereafter rises through an opening and joins with the air flowing from the opening, to be introduced into the atmospheric conditioning unit again and reused.

REFERENCES:
patent: 5518542 (1996-05-01), Matsukawa et al.
patent: 5639301 (1997-06-01), Sasada et al.
patent: 5792259 (1998-08-01), Yoshioka et al.
patent: 5928390 (1999-07-01), Yaegashi et al.
patent: 5972110 (1999-10-01), Akimoto

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