Apparatus for processing a signal for aligning

Details Apparatus for processing a signal for aligning Apparatus for processing a signal for aligning

1982-09-17

1985-05-07

Roseberger, R. A.

Optics: measuring and testing

By alignment in lateral direction

With light detector

356401, 250557, G01B 1100

Patent

active

045154813

ABSTRACT:
An apparatus for processing a signal for aligning a first object having at least one standard mark thereon with a second object having at least one reference mark thereon, includes a first sensor for sensing the standard mark, second sensor for sensing the reference mark through the first object, an illumination source for illuminating the standard mark and the reference mark, a first extracting circuit for extracting a signal concerning the standard mark from the signal stream of the first sensor, a second extracting circuit for extracting a signal concerning the reference mark from the signal stream of the second sensor, and a signal composing circuit for composing the signal concerning the standard mark and the signal concerning the reference mark.

REFERENCES:
patent: 4167677 (1979-09-01), Suzki
patent: 4219719 (1980-08-01), Frosien et al.
patent: 4251129 (1981-02-01), Suzki et al.
patent: 4406546 (1983-09-01), Suzuki

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