Apparatus for processing a plurality of circular wafers

Details Apparatus for processing a plurality of circular wafers Apparatus for processing a plurality of circular wafers

1995-01-06

1996-05-14

Bennet, Henry A.

Heating

Work feeding, agitating, discharging or conveying...

Removable furnace bottom section or kiln cart

432 5, 432 6, 432152, 432239, 432245, F27D 312

Patent

active

055162835

ABSTRACT:
An apparatus for processing a plurality of circular wafers including a tubular heater, a boat and a plurality of heat transfer bodies. The tubular heater has a heating space inside and radiates heat within the heating space. The boat is loaded inside the heating space of the tubular heater and holds the wafers in parallel. Heat transfer bodies are located between the wafers.

REFERENCES:
patent: 5297956 (1994-03-01), Yamabe et al.

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