Apparatus for probing multiple integrated circuit devices

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor

Reexamination Certificate

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Details

C324S754090

Reexamination Certificate

active

07436171

ABSTRACT:
A probing apparatus comprises a platform with a rectangular opening, two vertical rails positioned at two sides of the rectangular opening, two vertical sliding modules each including a vertical sliding base positioned on the vertical rail, a bearing member and a pivot connecting the vertical sliding base and the bearing member, at least one non-circular lateral rail with two ends positioned on the bearing member of the vertical sliding module, at least one lateral sliding module each including a lateral sliding base positioned on the lateral rail and a hanger positioned on the lateral sliding base, and at least one tunable stage configured to hang on the non-circular lateral rail via the hanger of the lateral sliding module.

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patent: 5291662 (1994-03-01), Matsumiya et al.
patent: 5489855 (1996-02-01), Poisel
patent: 6011405 (2000-01-01), Sikora
patent: 6040699 (2000-03-01), Holmes
patent: 6677773 (2004-01-01), Prokopp
patent: 7053639 (2006-05-01), Fyfield
patent: A 2003-209862 (2003-07-01), None
patent: A 1993-0006431 (1993-04-01), None

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