Apparatus for preventing the unstable growth rate of oxide cause

Details Apparatus for preventing the unstable growth rate of oxide cause Apparatus for preventing the unstable growth rate of oxide cause

1995-10-11

1997-01-21

Breneman, R. Bruce

Coating apparatus

Gas or vapor deposition

118723ME, 118423MP, C23C 1600

Patent

active

055956050

ABSTRACT:
The invention disclosed an efficient apparatus for solving the problem of unstable growth rate of oxide occurred when the procedure of wet oxidation is processed first and immediately followed by a procedure of dry oxidation. The invention involves in implementing as many insulating sleeves as required for wrapping around inlet pipes of a horizontal driven field oxidation tube to prevent water vapor from remaining in the inlet pipes so as to stabilize the growth rate of oxide.

REFERENCES:
patent: 5370736 (1994-12-01), Roy et al.
patent: 5445676 (1995-08-01), Takagi
patent: 5447568 (1995-09-01), Hayakawa et al.
patent: 5487784 (1996-01-01), Ellis, Jr.

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