Apparatus for preselecting and maintaining a fixed gap between a

Details Apparatus for preselecting and maintaining a fixed gap between a Apparatus for preselecting and maintaining a fixed gap between a

1988-01-11

1989-04-04

Albritton, C. L.

Electric heating

Metal heating

By arc

21912121, 21912122, 21912131, 21912133, 2504411, B23K 1500

Patent

active

048188387

ABSTRACT:
Disclosed is a particle beam lithography system (10) having a workpiece loading/unloading position to one side of a particle beam (32) and beam column (12) where a workpiece (14), to be processed, is placed in a vacuum chuck (100) to eliminate any irregularity or warpage of the workpiece (14). At this same position, the workpiece (14) is oriented and fixed at a preselected distance from a standard by gap setting means (162, 162b). This distance correlates with a preselected gap (G) between a seal apparatus (16) and the workpiece (14) during workpiece processing. The workpiece (14) and chuck (100) are then moved beneath the seal apparatus (16) and beam column (12) for workpiece processing. After processing, the workpiece (14) and chuck (100) are returned to the loading/unloading position to be removed from the lithography system (10). An interface plate (64) is moved from the loading/unloading position to the workpiece processing position by an X-Y stage (50) and a workpiece transport system (130) is provided to transport the workpieces (14) to and from the lithography system (10) to appropriate cassettes (132,134).

REFERENCES:
patent: 4584479 (1986-04-01), Lamattina et al.
patent: 4607167 (1986-08-01), Petric

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