Coating apparatus – Gas or vapor deposition – With treating means
Patent
1987-05-01
1989-01-17
Bueker, Richard
Coating apparatus
Gas or vapor deposition
With treating means
118 501, C23C 1650
Patent
active
047981679
ABSTRACT:
An apparatus for the preparation of a photoelectric conversion layer for a photoelectromotive force member includes:
REFERENCES:
patent: 3306768 (1987-02-01), Peterson
patent: 4439463 (1984-03-01), Miller
patent: 4597983 (1986-07-01), Kuhne
patent: 4650693 (1987-03-01), Kuisl
M. H. Brodsky et al., IBM Technical Discl. Bull., vol. 22, No. 8A, Jan. 1980, pp. 3391-3392.
Ishihara Shunichi
Oda Shunri
Saito Keishi
Shimizu Isamu
Bueker Richard
Canon Kabushiki Kaisha
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