Apparatus for preheating mold resin for a semiconductor device

Details Apparatus for preheating mold resin for a semiconductor device Apparatus for preheating mold resin for a semiconductor device

1984-05-30

1986-03-18

Albritton, C. L.

Electric heating

Metal heating

Of cylinders

219 1055F, 34 1, 264 25, H05B 664

Patent

active

045770786

ABSTRACT:
Preheating apparatus for use in a semiconductor molding apparatus for preheating mold resin before the mold resin is charged in a mold comprises a microwave generator generating a microwave, a waveguide connected to the microwave generator, and a positioning device for positioning the mold resin in such a manner that the center of the mold resin coincides with the position of a peak of the distribution of the electric field intensity due to the microwave.

REFERENCES:
patent: 3529115 (1970-09-01), Jawor
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patent: 4023279 (1977-05-01), Janda
patent: 4045638 (1977-08-01), Chiang et al.
patent: 4099042 (1978-07-01), Jean et al.
patent: 4128751 (1978-12-01), Sale
patent: 4144434 (1979-03-01), Chiron et al.
patent: 4160144 (1979-07-01), Kashyap et al.
patent: 4401873 (1983-08-01), Berggren et al.

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