Apparatus for pre-aligning substrate preparatory to fine alignme

Details Apparatus for pre-aligning substrate preparatory to fine alignme Apparatus for pre-aligning substrate preparatory to fine alignme

1984-10-01

1991-06-25

Rosenberger, Richard A.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

G01B 1100

Patent

active

050261665

ABSTRACT:
A pre-alignment system for use in an apparatus including a fine alignment system. The pre-alignment system includes two optical imaging systems for imaging two alignment marks provided on a substrate for the purpose of fine alignment onto two radiation-sensitive detectors. The outputs signals of the detectors are indicative of the pre-alignments of a associated substrate mark relative to the associated detection systems.

REFERENCES:
patent: 4037969 (1977-07-01), Feldman et al.
patent: 4062623 (1977-12-01), Suzuki et al.
patent: 4251129 (1981-02-01), Suzuki et al.
patent: 4573791 (1986-03-01), Phillips
"Automatic Alignment System for Optical Projection Printing" Bouwhuis et al. IEEE Trans. on Electron Devices vol. ED-26 #4 4/1979.

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