Apparatus for positioning silicon wafer

Material or article handling – Article reorienting device – Orienter has article gripping means

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

198394, 414754, B65G 4724

Patent

active

047706007

ABSTRACT:
There is disclosed an apparatus for positioning a silicon wafer which comprises: two pieces of supporting boards, fixed to an upper plate, for supporting both side portions of the silicon wafer; an adsorbing disk, disposed in a vertically movable and rotatable manner between the supporting boards, for supporting the silicon wafer in its central position, this adsorbing disk having its upper surface formed with adsorbing holes; a holding member disposed in a vertically movable manner on the circumference of the adsorbing disk between the supporting boards, this holding member having a movable holder which moves inwards by pushing the edge of the silicon wafer when going up while raising the silicon wafer supported on the adsorbing disk; and a photoelectric detector, fitted to a part of the supporting boards, for detecting the edge of an orientation flat of the silicon wafer. The silicon wafer loaded on the supporting boards is raised while being adsorbed by the adsorbing disk. The edge of the ORIFLA is detected by the photoelectric detector provided on the supporting board while rotating the adsorbing disk. On the basis of the thus detected position of the ORIFLA, the adsorbing disk is further rotated through a given angle, thus positioning the silicon wafer so that the ORIFLA is adjusted to a predetermined position.

REFERENCES:
patent: 4024944 (1977-05-01), Adams et al.
patent: 4457664 (1984-07-01), Judell et al.
patent: 4662811 (1987-05-01), Hayden
patent: 4685206 (1987-08-01), Kobayashi et al.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Apparatus for positioning silicon wafer does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for positioning silicon wafer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for positioning silicon wafer will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-804232

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.