Geometrical instruments – Gauge – Work support
Patent
1991-06-03
1992-09-01
Cuchlinski, Jr., William A.
Geometrical instruments
Gauge
Work support
33 1M, 33568, B25H 100, B23Q 1600
Patent
active
051427915
ABSTRACT:
An apparatus for positioning a sample comprises a fine adjustment stage and a coarse adjustment stage. The fine adjustment stage is held by three Z axis fine adjustment driving structures above the first base. The fine adjustment stage has a number of through holes. The fine adjustment stage is provided X and Y axes fine adjustment driving structures other than the Z axis fine adjustment driving structures. The coarse adjustment stage comprises the second base which is provided above the first base and a number of protrusions which are provided dispersively on the second base. The coarse adjustment stage is connected to X and Y axes coarse adjustment driving structures through flexible and elastic members. The sectional areas of the protrusions are selected to a size which is movable freely within the through holes, respectively. By adjusting the Z axis fine adjustment driving structures, a sample hold base is held either the coarse adjustment stage or the fine adjustment stage.
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Furukawa Takayasu
Kobayashi Isao
Kobayashi Toshinori
Tsunoda Masahiro
Cuchlinski Jr. William A.
Fulton C. W.
Hitachi , Ltd.
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