Apparatus for positioning an elevator tube

Details Apparatus for positioning an elevator tube Apparatus for positioning an elevator tube

2006-04-11

2006-04-11

Hewitt, James M. (Department: 3679)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C219S390000, C118S724000, C118S725000, C392S416000, C392S418000

Reexamination Certificate

active

07026581

ABSTRACT:
A wafer support position control mechanism selectively positions a semiconductor wafer along an axis of excursion within a process chamber. An elevator tube protrudes through an orifice in the chamber surface and is connected at a first distal end to the wafer support. A compliant, dynamic seal within the orifice engages the elevator tube to form a gas curtain within a gap between the seal and the elevator tube to seal the process chamber. A moveable carriage is connected to the elevator tube at a second distal end for moving the wafer support along the axis of excursion. Rigid mechanical structure couples the second distal end of the elevator tube to the moveable carriage.

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