Apparatus for positioning a semiconductor wafer

Details Apparatus for positioning a semiconductor wafer Apparatus for positioning a semiconductor wafer

1988-10-11

1989-09-12

Peters, Jr., Joseph F.

Conveyors: fluid current

Having means for maintaining load in suspension along flow path

With load orienting means

406 84, 406 88, B65G 4724

Patent

active

048654914

ABSTRACT:
An improved semiconductor wafer positioning apparatus which can achieve preliminary positioning of a semiconductor wafer with accuracy. The apparatus includes a positioning stage for receiving a semiconductor wafer thereon. The positioning stage has a pair of groups of semicircular grooves formed on an upper face thereof and communicated with an air sucking and blowing ports. Thus, air is blown out from the upper face of the positioning stage so that the semiconductor wafer is rotated by a blow of air. Meanwhile, the positioning stage is inclined a small angle so that the semiconductor wafer is moved downward by its own weight on the positioning stage until a positioning element is contacted with an orientation flat of the wafer to stop rotation of the wafer, thereby positioning the wafer in position.

REFERENCES:
patent: 3865254 (1975-02-01), Johannsmeier
patent: 3890508 (1975-06-01), Sharp
patent: 3982627 (1976-09-01), Isohata
patent: 4165132 (1979-08-01), Hassan et al.
patent: 4242038 (1980-12-01), Santini et al.
patent: 4348139 (1982-09-01), Hassan et al.
patent: 4425075 (1984-01-01), Quinn
O'Neill et al; Annular Orientor; IBM TDB vol. 20, No. 2, Jul. 1977; pp. 593-594.
Jorgensen et al; Precision Wafer Orientation and Transfer System; IBM TDB vol. 16, No. 9, Feb. 1974; pp. 2910-2911.

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