Apparatus for polishing the notch of a wafer

Details Apparatus for polishing the notch of a wafer Apparatus for polishing the notch of a wafer

1994-10-27

1998-03-31

Kisliuk, Bruce M.

Abrading

Machine

Reciprocating tool

451 43, 451 44, B24B 700, B24B 900

Patent

active

057331812

ABSTRACT:
An apparatus for polishing the notch of a wafer in an effective and efficient way, which comprises: a flexible tape carrying abrasive grains in the working face thereof; an infeed reel for feeding the tape stored thereon: a take-up reel for taking up the tape fed from the infeed reel; a motor for driving to rotate the take-up reel; a means for blowing a fluid to the backside surface to the edge portion of the notch to be in direct contact along the full periphery of the notch; and a means for oscillating the tape sideways.

REFERENCES:
patent: 4796387 (1989-01-01), Johnson

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