Apparatus for polishing planar substrates through rotating plate

Details Apparatus for polishing planar substrates through rotating plate Apparatus for polishing planar substrates through rotating plate

1997-10-28

1999-10-12

Eley, Timothy V.

Abrading

Machine

Rotary tool

451268, 451269, 451291, 451342, B24B 717

Patent

active

059646519

ABSTRACT:
An apparatus for polishing one or more planar substrates, such as magnetic disks, between rotating polishing plates is described. The apparatus is designed to optimize uniformity and flatness of the substrates by maintaining a substantially constant parallel and coaxial alignment between the rotating polishing plates.

REFERENCES:
patent: 1634745 (1927-07-01), Fraser
patent: 2418770 (1947-04-01), Holister et al.
patent: 3225492 (1965-12-01), Day et al.
patent: 3537214 (1970-11-01), Ford
patent: 4370835 (1983-02-01), Von Schneidemesser et sl.
patent: 5364655 (1994-11-01), Nakamura et al.
patent: 5647789 (1997-07-01), Kitta et al.
patent: 5782678 (1998-07-01), Cesna et al.

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