Apparatus for polishing hard disk substrates

Details Apparatus for polishing hard disk substrates Apparatus for polishing hard disk substrates

1991-10-31

1992-08-25

Rose, Robert A.

Abrasive tool making process, material, or composition

With carbohydrate or reaction product thereof

51133, 51215AR, 51215UE, 51240T, 51118, 1983452, 1984761, B24B 704, B24B 2900

Patent

active

051407744

ABSTRACT:
An apparatus capable of simultaneously polishing a plurality of hard disk substrates at the same time includes at least three substrate carriers which are rotatably disposed on an index table and which carry and transfer a plurality of hard disk substrates, are moved successively through a substrate loading station, a substrate polishing station and a substrate removing station in response to intermittent rotation of the index table.

REFERENCES:
patent: 1361883 (1920-12-01), Littman
patent: 1833329 (1931-11-01), Packer
patent: 1989517 (1935-01-01), Holmes
patent: 3115091 (1963-12-01), Hakogi
patent: 4593496 (1986-06-01), Klievoneit et al.
patent: 4856232 (1989-08-01), Shirai
"Disk Substrate Polisher"; Fox et al IBM Technical Disclosure Bulletin vol 26, No. 3B, Aug. 1983.

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