Apparatus for polishing

Details Apparatus for polishing Apparatus for polishing

1989-01-04

1991-07-16

Simmons, David A.

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

156636, 156645, 156903, 511312, 511313, 51183R, B24B 2900

Patent

active

050322036

ABSTRACT:
Polishing agent including as a main constituent an aqueous solution containing sodium bromite. The aqueous solution may further contain particles which are not dissolved in the solution or an alkali agent to adjust the pH to 8 to 14. Also the apparatus and method for polishing articles using the polishing agent are disclosed.

REFERENCES:
patent: 3406116 (1968-10-01), Vitale
patent: 3436286 (1969-04-01), Lange
patent: 3979239 (1976-09-01), Walsh
patent: 4057939 (1977-11-01), Basi
patent: 4435247 (1984-03-01), Basi et al.
patent: 4792416 (1988-12-01), Shimizu

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