Apparatus for plasma treatment of small diameter tubes

Details Apparatus for plasma treatment of small diameter tubes Apparatus for plasma treatment of small diameter tubes

1988-07-01

1989-07-11

Pianalto, Bernard D.

Coating apparatus

Gas or vapor deposition

With treating means

118 501, 118500, 118728, 427 2, 427 38, 427 47, 427237, 427238, C23C 1600

Patent

active

048461016

ABSTRACT:
An apparatus for generating a plasma in the lumen of a small diameter tube includes a housing having a diaphragm which separates the housing into a first chamber equipped with a gas inbleed assembly and a second chamber connected to a vacuum source. Parallel plate electrodes in the first chamber are encased in a dielectric which prevents substantially all plasma discharge external of a plasma zone between the electrodes. A conduit maintains gas flow between the chambers. A bore through the dielectric includes the plasma zone and receives the tube to be plasma treated.
A method for treating the luminal wall of a plastic tube includes positioning a tube in the plasma zone, evacuating the chambers, bleeding a gas into the chambers, and delivering radiofrequency power to the electrodes. A long tube may be drawn through the plasma zone, or the dielectric and electrodes may be moved past the tube.

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