Apparatus for plasma etching circuit boards or the like

Details Apparatus for plasma etching circuit boards or the like Apparatus for plasma etching circuit boards or the like

1986-08-26

1989-11-14

Schor, Kenneth M.

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

204298, 118 64, 118 66, 414150, 414153, 414155, 414160, C23F 102

Patent

active

048804894

ABSTRACT:
The circuit board plasma etching apparatus includes a preheating chamber, a plasma reaction chamber and a cooling chamber for etching circuit boards with plasma in a quasi continuous operation. The plasma reaction chamber is sealed by a gas-tight preheating sealing slide adjacent the preheating chamber and by a gas-tight cooling sealing slide adjacent the cooling chamber. A preheating door selectively closes the preheating entry end and a cooling door selectively closes the cooling chamber exit end. Boards to be etched are placed in printed circuit board cages supported by a guide rail within the chambers. The guide rail is separable into a preheating segment, a reaction chamber segment and a cooling segment contained within the respective chambers. A preheating chamber bellows allows axial movement of the preheating door, as does a cooling chamber bellows for the cooling chamber door. Axial displacement of the doors allows selective segmentation of the guide rail. A bypass conduit selectively allows gas exhausted from the cooling chamber to be fed to the preheating chamber.

REFERENCES:
patent: 2568803 (1951-09-01), Guenst
patent: 2762149 (1956-09-01), Mears
patent: 3163572 (1964-12-01), David
patent: 3607546 (1975-09-01), Grealey
patent: 3756898 (1973-09-01), Frantzen et al.
patent: 4442338 (1984-04-01), Yamazaki

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