Apparatus for planarizing a probe card and method using same

Details Apparatus for planarizing a probe card and method using same Apparatus for planarizing a probe card and method using same

2006-08-29

2006-08-29

Hollington, Jermele (Department: 2829)

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

Reexamination Certificate

active

07098650

ABSTRACT:
An apparatus for use with a wafer prober and a probe card comprising a stiffening member having a feature defining a first plane. The stiffening member is mountable atop the central portion of the probe card. A reference member is provided to mount to the wafer prober and has an underside with a feature defining a second plane. When the feature of the stiffening member defining the first plane is urged against the feature of the reference member defining a second plane the probe tips of the probe card are substantially planarized relative to the wafer prober.

REFERENCES:
patent: 4038599 (1977-07-01), Bove et al.
patent: 4786867 (1988-11-01), Yamatsu
patent: 4950982 (1990-08-01), Obikane et al.
patent: 5559446 (1996-09-01), Sano
patent: 5982183 (1999-11-01), Sano
patent: 6741085 (2004-05-01), Khandros et al.
patent: 6798224 (2004-09-01), Hembree et al.
patent: 6838893 (2005-01-01), Khandros et al.

Affiliated with

Also associated with

Rating

Apparatus for planarizing a probe card and method using same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for planarizing a probe card and method using same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for planarizing a probe card and method using same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3634917