Apparatus for performing epitaxial growth of ZNSE crystal from m

Chemical apparatus and process disinfecting – deodorizing – preser – Chemical reactor – Including specific material of construction

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422250, 422253, F30B 3500

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049684914

ABSTRACT:
In conducting a liquid phase epitaxial growth of a Zn crystal on a substrate wherein a batch of Se melt serving as a solvent is used and relying on a vapor pressure controlling technique and a temperature difference method, a Zn vapor pressure controlling region is disposed, via the Se melt, in a direction vertical to the surface of the substrate which is contained in the growth region, and a ZnSe source crystal is disposed in such a way that it is supplied into the Se melt in a lateral direction of this melt. Whereby, a ZnSe single crystal having a good cyrstal perfection, and a good linearity of the thickness of the grown crystal relative to time can be obtained.

REFERENCES:
patent: 3374067 (1968-03-01), Johnson et al.
patent: 3796548 (1974-03-01), Boss et al.
patent: 4315796 (1982-02-01), Nishizawa
Patents Abstracts of Japan, C-108, Jun. 16, 1982, vol. 6/No. 106.
Patents Abstracts of Japan, C-120, Aug. 19, 1982, vol. 6/No. 158.
Patents Abstracts of Japan, C-149, Feb. 4, 1983, vol. 7/No. 28.

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