Abrading – Tool support for flexible-member tool – Having magnetic or suction tool holding means
Patent
1997-10-08
2000-03-07
Scherbel, David A.
Abrading
Tool support for flexible-member tool
Having magnetic or suction tool holding means
451285, 451286, 451287, 451288, 451290, 451550, 451494, B24D 910
Patent
active
06033293&
ABSTRACT:
An apparatus and method for performing chemical-mechanical polishing is disclosed in which the pad is secured to the platen without the use of adhesives. A polishing pad and a platen are secured together by a releasable attractive force; the force may comprise a vacuum or electromagnetic force, and the pad has a hard or magnetic backside layer for facing the plating and responding to the attractive force. This invention has particular application to chemical-mechanical polishing for use in planarizing dielectrics.
REFERENCES:
patent: 5584746 (1996-12-01), Tanaka et al.
patent: 5704827 (1998-01-01), Nishi et al.
patent: 5853317 (1998-12-01), Yamamoto
Crevasse Annette Margaret
Maury Alvaro
Patel Sanjay
Sowell John Thomas
Lucent Technologies - Inc.
McDonald Shantese
Scherbel David A.
LandOfFree
Apparatus for performing chemical-mechanical polishing does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Apparatus for performing chemical-mechanical polishing, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for performing chemical-mechanical polishing will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-357828