Apparatus for peeling protective film off a thin article

Details Apparatus for peeling protective film off a thin article Apparatus for peeling protective film off a thin article

1986-08-27

1988-03-22

Czaja, Donald E.

Adhesive bonding and miscellaneous chemical manufacture

Surface bonding means and/or assembly means therefor

With gas, vapor, or flame contact means for work

156230, 156344, 156539, 156584, B32B 100, B32B 3100

Patent

active

047326425

ABSTRACT:
Apparatus for peeling a protective film off a thin article such as a silicon wafer is disclosed. The film is peeled by sticking an adhesive tape to the protective film on the article and pulling it away from the article. The protective film is peeled by the apparatus only by the adhesive force of the adhesive tape.

REFERENCES:
patent: 3785895 (1974-01-01), Ettre et al.
patent: 3992236 (1976-11-01), Wanesky
patent: 4029536 (1977-06-01), Kovacs et al.
patent: 4066249 (1978-01-01), Huber et al.
patent: 4127436 (1978-11-01), Friel
patent: 4285759 (1981-08-01), Allen et al.
patent: 4312694 (1982-01-01), Sherman et al.
patent: 4378264 (1983-03-01), Pilette et al.

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