Apparatus for passing workpieces into and out of a coating chamb

Details Apparatus for passing workpieces into and out of a coating chamb Apparatus for passing workpieces into and out of a coating chamb

1987-09-02

1989-04-11

Bucci, David A.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

118719, 414225, C23C 1422

Patent

active

048201065

ABSTRACT:
In an apparatus for passing a discoidal workpiece into and out of a coating chamber through a lock and for shifting the workpiece into and out of the range of a coating source, a swivelling arm is journaled for movement about a vertical axis on the top of the coating chamber. The ends of the swiveling arm have jacks bearing workpiece holding plates which transport the workpiece to an opening in the coating chamber. The workpiece holders are adapted to close off the opening from above. A turntable which can swivel about a vertical axis in the interior of the coating chamber has recesses on its top side for accommodating the workpieces. Lifting plates are journaled in these recesses and can be raised and lowered by lifting means in the bottom plate. The lifting plates are constructed such that, with the turntable in a first position, they pick up the workpieces in the area of the opening and at the same time close off the bottom of the opening, and in a second position they raise the workpieces into the range of action of a cathode.

REFERENCES:
patent: 3874525 (1975-04-01), Hassan et al.
patent: 3915117 (1975-10-01), Schertler
patent: 4355937 (1982-10-01), Mack et al.
patent: 4523955 (1985-06-01), Dimock
patent: 4685852 (1987-08-01), Rubin et al.
patent: 4699554 (1987-10-01), Kawashima et al.

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