Apparatus for parting wafer-shaped silicon bodies, useful for so

Details Apparatus for parting wafer-shaped silicon bodies, useful for so Apparatus for parting wafer-shaped silicon bodies, useful for so

1988-09-26

1989-10-03

Dixon, Jr., William R.

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

Including specific material of construction

156DIG84, 156DIG88, 1566204, 15662071, B01D 900

Patent

active

048715174

ABSTRACT:
A method and apparatus for producing disk-shaped or wafer-shaped silicon bodies from a silicon tape produced in a horizontal tape-drawing process, utilizing a woven fabric of graphite threads as a carrier for the silicon to be crystallized. The crystallization of the molten silicon is initiated by heating sources positioned about the melt crucible. Radiation losses are reduced by providing shielding members in predetermined, prescribed intervals corresponding to the areas at which the parting lines are to be provided in the tape. The shielding members reduce the radiation losses to such an extent that a readily frangible line is produced in the area of the shielding members enabling the tape to be broken up at regular, predetermined intervals on a continuous basis.

REFERENCES:
patent: 4305776 (1981-12-01), Grabmaier
patent: 4319953 (1982-03-01), Grabmaier
patent: 4329195 (1982-05-01), Kudo
patent: 4554203 (1985-11-01), Grabmaier et al.
patent: 4563976 (1986-01-01), Foell et al.
patent: 4563979 (1986-01-01), Falckenberg
patent: 4664745 (1987-05-01), Falckenberg et al.

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