Optics: measuring and testing – By light interference – Having polarization
Reexamination Certificate
2007-02-06
2007-02-06
Lee, Hwa (Andrew) (Department: 2877)
Optics: measuring and testing
By light interference
Having polarization
C356S496000
Reexamination Certificate
active
10415984
ABSTRACT:
The invention concerns an apparatus for parallel detection of the behaviour of mechanical micro-oscillators interacting with the sample (21). The amplitude and the phase of resonance of micro-oscillators (12) are measured with optical means. The invention is characterised in that a source (1) is active during a fraction 1
of the period (n being an integer) and of variable phase p
of the period (p being an integer). Interferences are produced between light beams generated by reflection of incident light beams (7) and (8) on the micro-oscillators (12). Periodically the micro-oscillators (12) are displaced by means. The value of the parameter p (p being an integer) is varied and N elementary measurements are integrated to obtain a measurement representing each of the values of p. The phase and amplitude of each micro-oscillator (12) are calculated on the basis of the representative data obtained for each value of p and this for a large number of accumulations. The invention is applicable in the field of nanotechnologies.
REFERENCES:
patent: 5445008 (1995-08-01), Wachter et al.
patent: 6016686 (2000-01-01), Thundat
patent: 6219145 (2001-04-01), Gutierrez et al.
patent: 6765680 (2004-07-01), Carr et al.
Bergaud Christian
Boccara Albert Claude
Potier Marie-Claude
Roger Jean-Paul
Centre National de la Recherche Scientifique (C.N.R.S.)
Lee Hwa (Andrew)
Young & Thompson
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