Apparatus for optically measuring the height of surface irregula

Details Apparatus for optically measuring the height of surface irregula Apparatus for optically measuring the height of surface irregula

1991-12-23

1993-07-20

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356376, G01N 2186

Patent

active

052296199

ABSTRACT:
A device for optically measuring the height of surface irregularities of an object. A scanning spot of radiation (11) is formed on such surface, and a first optical imaging system (20) forms a reflected image (31) of the scanning spot on a diffusely reflective or transmissive screen (30). A second imaging system (40) forms from the imaged scanning spot (31) a re-imaged scanning spot (51) on the photosensitive surface of a position-sensitive radiation detection system (50). The screen is arranged so that the radiation from scanning spot (11) is incident thereon at a small grazing angle, and is adapted to diffuse the radiation from the imaged scanning spot (31) to produce radiation directed substantially normally on the photosensitive surface of the radiation detection system. A high degree of correlation between the position of the re-imaged scanning spot (51) on the photosensitive surface and the height (.DELTA.Z) of the surface of the object being measured is thereby achieved. The substantially normal direction of incidence of radiation on the photosensitive surface minimizes reflection therefrom and so improves the efficiency of the radiation detection system.

REFERENCES:
patent: 2706262 (1955-04-01), Barnes
patent: 4748329 (1988-05-01), Cielo et al.
patent: 4782239 (1988-11-01), Hirose et al.
patent: 4982103 (1991-01-01), Meiffren et al.
patent: 5024529 (1991-06-01), Svetroff et al.
patent: 5076693 (1991-12-01), Teramoto

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