Apparatus for optically forming pattern

Details Apparatus for optically forming pattern Apparatus for optically forming pattern

1992-10-26

1995-03-07

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Detailed holder for original

355 53, 355125, G03B 2762

Patent

active

053963121

ABSTRACT:
An apparatus for optically forming a pattern on an object using a reticle having an original pattern to be optically projected. The apparatus is equipped with a storage circuit for storing information indicative of an exposure condition for the reticle, the storage circuit being attached to the reticle. An exposure apparatus reads out the information from the storage circuit so as to project the original pattern of the reticle on the object in accordance with the read information so that a pattern corresponding to the original pattern is formed on the object. This arrangement can automatically and accurately set the exposure condition in the exposure apparatus.

REFERENCES:
patent: 4240744 (1980-12-01), Rapp et al.
patent: 4396281 (1983-08-01), Okabe et al.
patent: 4624557 (1986-11-01), Winn
patent: 4963921 (1990-10-01), Kariya et al.
patent: 4980781 (1990-12-01), Yamamoto et al.

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