Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1995-09-08
1997-10-21
Nelms, David C.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356363, 250237G, 25023117, G01B 1102, G01D 534, G01J 900
Patent
active
056802110
ABSTRACT:
A displacement detection apparatus includes a light source (1), a first diffraction grating (G1) which is arranged on the same substrate as a second diffraction grating (G2) so as to diffract and split light emitted from the light source and to irradiate .+-.1st-order diffracted light beams onto the second diffraction grating (G2), a third diffraction grating (G3) for synthesizing a +1st-order reflectively diffracted light beam generated by reflectively diffracting the +1st-order diffracted light beam by the second diffraction grating, and a -1st-order reflectively diffracted light beam generated by reflectively diffracting the +1st-order diffracted light beam by the second diffraction grating to form interference light, and a light-receiving element (3) for converting the interference light into a signal representing a displacement of the substrate.
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Ishii Satoshi
Ishizuka Koh
Kaneda Yasushi
Kondo Hiroshi
Canon Kabushiki Kaisha
Eisenberg Jason D. Vierra
Nelms David C.
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