Apparatus for optically detecting a position of mark

Details Apparatus for optically detecting a position of mark Apparatus for optically detecting a position of mark

1995-06-06

1996-11-05

Evans, F. L.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

250548, G01B 1100

Patent

active

055723250

ABSTRACT:
A position detecting apparatus for optically observing an opaque mark formed on a transparent substrate to detect a position of the mark with a high degree of accuracy. The apparatus includes a detection optical system for forming a detected image of the mark, an illumination system for supplying an illuminating light to the mark through an objective lens of the detection optical system, projection means arranged to face the detection optical system through the substrate and forming a conjugate position to the mark, and reflecting means which is settable substantially at the conjugate position. The image of the mark can be detected as either a bright image or a dark image under the conditions where there are a sufficient contrast between the mark and the background and a uniform background density. The shape of the mark and the arrangement of patterns around the mark can be determined as desired.

REFERENCES:
patent: 4405229 (1983-09-01), Mayer
patent: 5150173 (1992-09-01), Isobe et al.
patent: 5483348 (1996-01-01), Kamatsu et al.

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