Optics: measuring and testing – By light interference – Having wavefront division
Reexamination Certificate
2007-01-09
2007-01-09
Lee, Hwa(Andrew) (Department: 2877)
Optics: measuring and testing
By light interference
Having wavefront division
Reexamination Certificate
active
11139479
ABSTRACT:
The present invention is directed at a coherence test reticle or lithographic plate, and a method for testing the coherence of a laser beam using the test reticle. The quality or coherence of the laser beam is measured by illuminating the test reticle and recording and/or analyzing the optical patterns generated by the illumination. The technique was designed for the characterization of laser-based systems via the detection of optical radiation modulated by transmissive, reflective and diffractive patterns printed on a reticle or lithographic plate designed specifically for this purpose. The novelty and advantages over the prior art are insensitivity to vibration, alignment, and multi-path differences associated with classical interferometric coherence measurement techniques. The technique is focus error insensitive. The robustness and convenience of the technique is driven by the use of a single plate with no optical alignment, making the technique easily implemented in the field.
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ASML Holding N.V.
Lee Hwa(Andrew)
Sterne Kessler Goldstein & Fox P.L.L.C.
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