Apparatus for optical proximity correction, method for...

Details Apparatus for optical proximity correction, method for... Apparatus for optical proximity correction, method for...

2006-06-13

2006-06-13

Nghiem, Michael (Department: 2863)

Data processing: measuring, calibrating, or testing

Calibration or correction system

C438S401000

Reexamination Certificate

active

07062396

ABSTRACT:
An apparatus for optical proximity correction according to an embodiment of the present invention has a data collector configured to collect source data of a circuit pattern, an edge line detector configured to detect edge lines each of which has a size that is less than a line width of the electrical circuit pattern, an edge line modifier configured to modify each of the edge lines so as to prevent an excess optical proximity correction, and a data synthesizer configured to generate pre-correction data from the modified edge lines and the source data.

REFERENCES:
patent: 6426269 (2002-07-01), Haffner et al.
patent: 6536015 (2003-03-01), Ono
patent: 6570174 (2003-05-01), Tounai et al.
patent: 6868175 (2005-03-01), Yamamoto et al.

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