Apparatus for optical measurement of an object

Details Apparatus for optical measurement of an object Apparatus for optical measurement of an object

2005-05-25

2008-10-28

Connolly, Patrick (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C073S655000

Reexamination Certificate

active

07443513

ABSTRACT:
An apparatus for optical measurement of an object, especially for measuring movement, is provided, which includes an interferometer for measuring movements along the measurement beam of the interferometer, as well as a confocal auto-focus microscope. The interferometer is coupled in the beam path of the confocal auto-focus microscope, such that the measurement beam of the interferometer is simultaneously the focusing beam of the microscope. Here, it is guaranteed that the interferometric movement measurement is always performed at the focal point of the microscope that is used. This enables automatic correction of the Guoy effect for objectives with high numerical aperture. In addition, for the use of a scanning confocal auto-focus microscope, data sets of test objects can also be measured, which comprise their vibrational behavior, height profile, and optionally also their in-plane movement behavior.

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