Apparatus for optical differential measurement of glide height a

Details Apparatus for optical differential measurement of glide height a Apparatus for optical differential measurement of glide height a

1996-09-23

1997-12-30

Font, Frank G.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356351, G01B 902

Patent

active

057036845

ABSTRACT:
A glide height tester for inspecting a surface of a spinning magnetic disk includes a glide plate, which is mounted to pivot above the disk surface. A reflective surface fastened to the glide plate is imaged by interferometric apparatus which produces a calculated output indicating a first angle of the glide plate. The interferometric apparatus includes a Wollaston prism, which can be rotated 90-degrees to provide an output indicating a second angle of the glide plate, perpendicular to the first angle.

REFERENCES:
patent: 4298283 (1981-11-01), Makosch et al.
patent: 4320973 (1982-03-01), Fortunato et al.
patent: 4534649 (1985-08-01), Downs
patent: 4844616 (1989-07-01), Kulkarne et al.
patent: 5122648 (1992-06-01), Cohen et al.
patent: 5469259 (1995-11-01), Golby et al.
patent: 5475488 (1995-12-01), Fukuzawa et al.
patent: 5600441 (1997-02-01), De Groot et al.
T. Bayer and G. Makosch, Photolithgraphic Process Control By Optical Phase Monitoring Of Latent Images In Photoresist, IBM Tech. Disclosure Bulletin, vol. 34, No. 10A, Mar., 1992, pp. 140-143.
U. Frank-Schmidt and G. Makosch, Interferometric Method Of Checking The Overlay Accuracy In Photolithographic Exposure Processes, IBM Tech. Disclosure Bulletin, vol. 32, No. 10B, Mar. 1990, pp. 214-217.
G. Makosch, System For Stepless Beam Splitting, IBM Tech., Disclosure Bulletin, vol. 30, No. 11, Apr. 1988, pp. 249-250.
H. Korth and F. Schedwie, Analyzing Optical Phase Structures, IBM Tech. Disclosure Bulletin, vol. 24, No. 6, Nov., 1981, pp. 3094-3095.

Affiliated with

Also associated with

Rating

Apparatus for optical differential measurement of glide height a does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for optical differential measurement of glide height a, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for optical differential measurement of glide height a will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-207645