Apparatus for obtaining planarity measurements with respect...

Details Apparatus for obtaining planarity measurements with respect... Apparatus for obtaining planarity measurements with respect...

2008-06-10

2009-08-25

Patel, Paresh (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S758010

Reexamination Certificate

active

07579853

ABSTRACT:
A system and method of mitigating the effects of component deflections in a probe card analyzer system may implement three-dimensional comparative optical metrology techniques to model deflection characteristics. An exemplary system and method combine non-bussed electrical planarity measurements with fast optical planarity measurements to produce “effectively loaded” planarity measurements.

REFERENCES:
patent: 5974662 (1999-11-01), Eldridge et al.
patent: 7231081 (2007-06-01), Snow et al.
patent: 2003/0142862 (2003-07-01), Snow et al.
patent: 2004/0222808 (2004-11-01), Strom et al.
patent: 1061381 (2000-12-01), None

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