Apparatus for obtaining planarity measurements with respect...

Details Apparatus for obtaining planarity measurements with respect... Apparatus for obtaining planarity measurements with respect...

2011-06-14

2011-06-14

Patel, Paresh (Department: 2858)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S750160

Reexamination Certificate

active

07960981

ABSTRACT:
A system and method of mitigating the effects of component deflections in a probe card analyzer system may implement three-dimensional comparative optical metrology techniques to model deflection characteristics. An exemplary system and method combine non-bussed electrical planarity measurements with fast optical planarity measurements to produce “effectively loaded” planarity measurements.

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