Apparatus for observing features and defects of a sample

Details Apparatus for observing features and defects of a sample Apparatus for observing features and defects of a sample

1991-12-06

1993-12-07

Rosenberger, Richard A.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

356430, 356239, 250562, 358106, G01N 2100

Patent

active

052687350

ABSTRACT:
According to the present invention, an optical inspection apparatus which can observe a light-transmitted portion and a light-reflected portion within objects of inspection, distinguishable from each other within the same field of vision, is provided.

REFERENCES:
patent: 3972616 (1976-08-01), Minami et al.
patent: 4647208 (1987-03-01), Bieman
patent: 4648053 (1987-03-01), Fridge
patent: 4737649 (1988-04-01), Naruse
patent: 4958083 (1990-09-01), Sakamoto
patent: 5031112 (1991-07-01), Sakai et al.
patent: 5098191 (1992-03-01), Noguchi et al.

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