Apparatus for observing a surface using polarized light

Optics: measuring and testing – By polarized light examination

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

356369, 359385, 359386, G01J 400

Patent

active

057643636

ABSTRACT:
An observation apparatus of the present comprises (i) a light source for generating light; (ii) a separating optical system which splits the light from the light source into two different polarized light beams; (iii) a condenser optical system which converges the two polarized light beams from the separating optical system so as to respectively form light spots on two different positions on a sample object; (iv) a polarization selecting means which has a predetermined analyzer angle and selects a specific polarized light component from composite light made of the two polarized light beams by way of the sample object; (v) light detecting means which detects the polarized light component selected by the polarization selecting means; and (vi) phase difference adjustment means which adjusts a phase difference between the two polarized light beams by way of the sample object and guides composite light composed of the two polarized light beams as circularly polarized light to the polarization selecting means, when the sample object does not modulate both phase and amplitude of the light incident thereon. Accordingly, this observation apparatus can detect a phase difference generated between the two light components respectively emitted from both side of a level difference on the sample object.

REFERENCES:
patent: 2601175 (1952-06-01), Smith
patent: 4037929 (1977-07-01), Bricot et al.
patent: 4298283 (1981-11-01), Makosch et al.
patent: 4456339 (1984-06-01), Sommargren
patent: 4841510 (1989-06-01), Yoshizawa
patent: 5311284 (1994-05-01), Nishino
patent: 5457536 (1995-10-01), Kornfield et al.
patent: 5479252 (1995-12-01), Worster et al.
patent: 5572359 (1996-11-01), Otaki et al.
patent: 5604591 (1997-02-01), Kitagawa
"Quantitative surface topography determination by Nomarski reflection microscopy. I. Theor", Lessor et al., J. Opt. Soc. Am., vol. 69, No. 2, Feb. 1979, pp. 357-366.
Bristow, Non-Contact Surface Roughness Meter "MP2000", O Plus E, No. 155, 1992, pp. 70-72. (Translation).
Iwasaki et al, "Differential Detection of Differential Interference Contrast Microscope and Its Application", Proceedings of 16th Meeting of Japan Society for Laser Microscopy, 1995, pp. 63-67. (Translation).
Bristow et al, "Surface Measurements and Applications for Manufactured Parts Using Noncontact Profilometer", SPIE, vol. 954, Optical Testing and Metrology II, 1988, pp. 217-225.
Ooki et al, "Differential interference contrast microscope with differential detection for optimizing image contrast", Applied Optics, vol. 35, No. 13, 1996, pp. 2230-2234.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Apparatus for observing a surface using polarized light does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for observing a surface using polarized light, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for observing a surface using polarized light will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2207152

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.