Apparatus for moving curved-surface mirror, exposure...

Details Apparatus for moving curved-surface mirror, exposure... Apparatus for moving curved-surface mirror, exposure...

2007-10-23

2010-12-28

Nguyen, Hung Henry (Department: 2882)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S052000, C359S811000

Reexamination Certificate

active

07859643

ABSTRACT:
An apparatus for moving a spherical mirror in which at least three actuators move the spherical mirror, at least five position sensors sense the position of the spherical mirror, and a controller calculates coordinates of a center of curvature of the spherical mirror with three-degrees-of-freedom, based on positions sensed by the at least five position sensors. The controller controls driving of the at least three actuators in accordance with a difference between the calculated coordinates and predetermined coordinates, so that the center of curvature of the spherical mirror is held fixed to the predetermined coordinates.

REFERENCES:
patent: 6842277 (2005-01-01), Watson
patent: 7151588 (2006-12-01), Franken et al.
patent: 7154684 (2006-12-01), Shibazaki
patent: 7603010 (2009-10-01), Kwan et al.
patent: 2006/0232866 (2006-10-01), Sai et al.
patent: 2007/0121224 (2007-05-01), Shibazaki
patent: 2002-131605 (2002-05-01), None
patent: 2004-64076 (2004-02-01), None

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