Apparatus for monitoring epitaxial growth

Details Apparatus for monitoring epitaxial growth Apparatus for monitoring epitaxial growth

1986-08-26

1988-03-22

McIntosh, John P.

Coating apparatus

With indicating, testing, inspecting, or measuring means

With means for visual observation

118730, H01L 21203

Patent

active

047321083

ABSTRACT:
The present invention is directed to apparatus for monitoring epitaxial crystalline growth mounted in a vacuum chamber, said apparatus including a support for mounting a single crystal substrate surface, a device for applying epitaxial material to the substrate surface, a device for impinging an electron beam upon the substrate surface to emit secondary electrons therefrom, and a system for detecting the secondary electrons emitted and for outputting a corresponding signal.

REFERENCES:
patent: 3019336 (1962-01-01), Johns
patent: 4575462 (1986-03-01), Dobson et al.

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