Apparatus for mixing liquids in a certain ratio

Details Apparatus for mixing liquids in a certain ratio Apparatus for mixing liquids in a certain ratio

1991-11-21

1994-09-13

Jenkins, Robert W.

Agitating

By injecting gas into mixing chamber

222 56, 222 64, B01F 1302, B01F 1504

Patent

active

053463021

ABSTRACT:
An apparatus for mixing a deionized water and a hydrofluoric acid precisely in the ratio of 100:1, so as to produce a mixture which are properly used in etching wafters. The mixing apparatus comprises a self-lubricating plastic container of a double construction which enables to obtain a more precise quantity of liquid. The mixing apparatus also comprises an electronic balance measuring the weight of the liquid mixture, an indicator indicating numerically the weight measured by the balance, a mixing tank mixing the liquids, and control valves supplying the liquids in large and small quantities, respectively. According to this arrangement, it is possible to obtain a mixture of a large quantity liquid or a small quantity liquid in a precise mixing ratio with a tolerance of within 1%. Thereby, any poor etching of wafers can be avoided.

REFERENCES:
patent: 3843099 (1974-10-01), Duncan
patent: 4014527 (1977-03-01), Watson
patent: 4845965 (1989-07-01), Copeland
patent: 4878758 (1989-11-01), Schafer

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