Apparatus for melt-level detection in Czochralski crystal growth

Details Apparatus for melt-level detection in Czochralski crystal growth Apparatus for melt-level detection in Czochralski crystal growth

1997-02-27

2000-06-06

Hiteshew, Felisa

Single-crystal, oriented-crystal, and epitaxy growth processes;

Apparatus

With means for measuring, testing, or sensing

117 14, 117202, C03B 3500

Patent

active

060713402

ABSTRACT:
A method of and system for determining the melt-level in a crystal growing system. A rangefinder emits a signal to reflect off the melt. The reflected signal is directed to a retroreflector. The retroreflector redirects the signal along a parallel path back to the melt surface. The redirected signal is reflected off the melt surface back to the rangefinder, where it is analyzed to determine the distance traveled by the signal. From this, changes in melt-level are determined and the melt-level may be appropriately controlled.

REFERENCES:
patent: 4508970 (1985-04-01), Ackermann
patent: 4915775 (1990-04-01), Katsuoka et al.
patent: 5408952 (1995-04-01), Wakabayashi et al.
patent: 5660629 (1997-08-01), Shiraishi et al.

Affiliated with

Also associated with

Rating

Apparatus for melt-level detection in Czochralski crystal growth does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for melt-level detection in Czochralski crystal growth, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for melt-level detection in Czochralski crystal growth will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2210363